Right-click the downloaded archive → → Choose C:\Mitsubishi\Setup (avoid long path names or spaces).
If your file is corrupted or suspicious, consider using official software instead: servo configuration software mrzjw3setup151e install
Jogging the motor directly from your laptop to verify mechanical integrity. servo configuration software mrzjw3setup151e install
to install the software, especially on Windows Vista or later. Pre-Installation: servo configuration software mrzjw3setup151e install