Compared to a standard 13.56 MHz ICP operating at similar power (≈ 200 W), the FSDSS‑232 delivers and ~15 % greater electron temperature , while maintaining comparable uniformity. The energy conversion efficiency of 38 % rivals the best‑in‑class inductively coupled devices, despite the compact geometry.
The data suggest a beyond 150 W, likely due to increased radiative and conductive losses. fsdss232 hot